Inventor
LU CHANG-SHEN
TW4 patents
⚠️ This page may combine multiple inventors who share the name “LU CHANG-SHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS9517539B2Dec 13, 2016
Wafer susceptor with improved thermal characteristics
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10435811B2Oct 8, 2019
Wafer susceptor with improved thermal characteristics
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US11773506B2Oct 3, 2023
Wafer susceptor with improved thermal characteristics
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62