Inventor
IKEDA GAKU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IKEDA GAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7672502B2Mar 2, 2010
Substrate positioning device, substrate positioning method and program
TOKYO ELECTRON LTD10 citations80
US10269605B2Apr 23, 2019
Processing system and processing program
TOKYO ELECTRON LTD1 citations57
US7630785B2Dec 8, 2009
Substrate processing system for setting uniform module cycle length and access control time lag in two pipeline processing systems
TOKYO ELECTRON LTD6 citations57
US9810905B2Nov 7, 2017
Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium
TOKYO ELECTRON LTD0 citations36