Inventor
VAN HOOF BRAM
NL3 patents
Patents
3 patentsUS11307507B2Apr 19, 2022
Method to obtain a height map of a substrate having alignment marks, substrate alignment measuring apparatus and lithographic apparatus
ASML NETHERLANDS BV2 citations60
US10289009B2May 14, 2019
Lithographic apparatus, control method and computer program product
ASML NETHERLANDS BV0 citations47
US10915033B2Feb 9, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations44