Inventor
SHKLOVER VITALIY
DE16 patents
⚠️ This page may combine multiple inventors who share the name “SHKLOVER VITALIY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
11 patentsUS11525946B2Dec 13, 2022
Method for in situ protection of an aluminum layer and optical arrangement for the VUV wavelength range
ZEISS CARL SMT GMBH5 citations71
US10642167B2May 5, 2020
Optical element
ZEISS CARL SMT GMBH4 citations70
US10578783B2Mar 3, 2020
Optical grating and optical assembly for same
ZEISS CARL SMT GMBH2 citations66
US11366395B2Jun 21, 2022
Mirror, in particular for a microlithographic projection exposure system
ZEISS CARL SMT GMBH1 citations62
US11029515B2Jun 8, 2021
Optical element, and method for correcting the wavefront effect of an optical element
ZEISS CARL SMT GMBH0 citations62
US11982788B2May 14, 2024
Method for forming nanostructures on a surface and optical element
ZEISS CARL SMT GMBH0 citations61
US11099484B2Aug 24, 2021
Method for repairing reflective optical elements for EUV lithography
ZEISS CARL SMT GMBH0 citations59
US10649340B2May 12, 2020
Reflective optical element for EUV lithography
ZEISS CARL SMT GMBH1 citations59
US11681236B2Jun 20, 2023
Method for in-situ dynamic protection of a surface and optical assembly
ZEISS CARL SMT GMBH0 citations50
US12210289B2Jan 28, 2025
Mirror, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations49
US11328831B2May 10, 2022
Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus
ZEISS CARL SMT GMBH0 citations47
ZEISS CARL LASER OPTICS GMBH
4 patentsUS7629572B2Dec 8, 2009
Optical devices and related systems and methods
ZEISS CARL LASER OPTICS GMBH7 citations71
US9933711B2Apr 3, 2018
Optical element
ZEISS CARL LASER OPTICS GMBH5 citations69
US7944615B2May 17, 2011
Optical system and method for shaping a profile of a laser beam
ZEISS CARL LASER OPTICS GMBH6 citations57
US9703209B2Jul 11, 2017
Reflective optical element for grazing incidence in the EUV wavelength range
ZEISS CARL LASER OPTICS GMBH0 citations51