Inventor
PARK CHAN HOON
KR23 patents
⚠️ This page may combine multiple inventors who share the name “PARK CHAN HOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
14 patentsUS6826743B2Nov 30, 2004
Method for automatically correcting overlay alignment of a semiconductor wafer
SAMSUNG ELECTRONICS CO LTD18 citations80
US6825912B2Nov 30, 2004
System for adjusting a photo-exposure time
SAMSUNG ELECTRONICS CO LTD7 citations73
US6445443B1Sep 3, 2002
Lithography system including mechanism for setting optimal process parameters and method of operating the same
SAMSUNG ELECTRONICS CO LTD10 citations73
US10319805B2Jun 11, 2019
Method of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD2 citations72
US10964578B2Mar 30, 2021
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations69
US6700648B2Mar 2, 2004
Method for controlling a processing apparatus
SAMSUNG ELECTRONICS CO LTD11 citations65
US7012670B2Mar 14, 2006
Method and apparatus for adjusting a photo-exposure time
SAMSUNG ELECTRONICS CO LTD2 citations62
US11521866B2Dec 6, 2022
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11037806B2Jun 15, 2021
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US7908105B2Mar 15, 2011
Measurement system for correcting overlay measurement error
SAMSUNG ELECTRONICS CO LTD3 citations60
US11437264B2Sep 6, 2022
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58
US10720491B2Jul 21, 2020
Method of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations51
US7594969B2Sep 29, 2009
Device for controlling dispensing error in photo spinner equipment
SAMSUNG ELECTRONICS CO LTD0 citations48
US9799561B2Oct 24, 2017
Method for fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations41
LG ELECTRONICS INC
4 patentsUS6883759B2Apr 26, 2005
Front panel operating apparatus and method
LG ELECTRONICS INC15 citations83
US7253367B2Aug 7, 2007
Information input system for terminal and multifunctional button assembly for use in the same
LG ELECTRONICS INC6 citations73
US7183513B2Feb 27, 2007
Information input system for terminal and multifunctional button assembly for use in the same
LG ELECTRONICS INC3 citations62
US7419123B2Sep 2, 2008
Front panel operating apparatus and method
LG ELECTRONICS INC1 citations51