P

Inventor

PARK CHAN HOON

KR23 patents
⚠️ This page may combine multiple inventors who share the name “PARK CHAN HOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

14 patents
US6826743B2Nov 30, 2004

Method for automatically correcting overlay alignment of a semiconductor wafer

SAMSUNG ELECTRONICS CO LTD18 citations80
US6825912B2Nov 30, 2004

System for adjusting a photo-exposure time

SAMSUNG ELECTRONICS CO LTD7 citations73
US6445443B1Sep 3, 2002

Lithography system including mechanism for setting optimal process parameters and method of operating the same

SAMSUNG ELECTRONICS CO LTD10 citations73
US10319805B2Jun 11, 2019

Method of fabricating semiconductor devices

SAMSUNG ELECTRONICS CO LTD2 citations72
US10964578B2Mar 30, 2021

Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device

SAMSUNG ELECTRONICS CO LTD4 citations69
US6700648B2Mar 2, 2004

Method for controlling a processing apparatus

SAMSUNG ELECTRONICS CO LTD11 citations65
US7012670B2Mar 14, 2006

Method and apparatus for adjusting a photo-exposure time

SAMSUNG ELECTRONICS CO LTD2 citations62
US11521866B2Dec 6, 2022

Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus

SAMSUNG ELECTRONICS CO LTD0 citations60
US11037806B2Jun 15, 2021

Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus

SAMSUNG ELECTRONICS CO LTD0 citations60
US7908105B2Mar 15, 2011

Measurement system for correcting overlay measurement error

SAMSUNG ELECTRONICS CO LTD3 citations60
US11437264B2Sep 6, 2022

Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device

SAMSUNG ELECTRONICS CO LTD0 citations58
US10720491B2Jul 21, 2020

Method of fabricating semiconductor devices

SAMSUNG ELECTRONICS CO LTD0 citations51
US7594969B2Sep 29, 2009

Device for controlling dispensing error in photo spinner equipment

SAMSUNG ELECTRONICS CO LTD0 citations48
US9799561B2Oct 24, 2017

Method for fabricating a semiconductor device

SAMSUNG ELECTRONICS CO LTD0 citations41

LG ELECTRONICS INC

4 patents

KANG IN HO

2 patents

LEE MOON-SANG

1 patent

HYUNDAI MOTOR CO LTD

1 patent

NAVER CORP

1 patent