Inventor
AKBULUT DUYGU
NL18 patents
Patents
18 patentsUS11940739B2Mar 26, 2024
Metrology apparatus
ASML NETHERLANDS BV1 citations72
US11262661B2Mar 1, 2022
Metrology apparatus
ASML NETHERLANDS BV4 citations72
US10788766B2Sep 29, 2020
Metrology sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV4 citations72
US10317808B2Jun 11, 2019
Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method
ASML NETHERLANDS BV3 citations72
US10444640B2Oct 15, 2019
Metrology apparatus, lithographic system, and method of measuring a structure
ASML NETHERLANDS BV4 citations71
US10185224B2Jan 22, 2019
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV3 citations70
US9927722B2Mar 27, 2018
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV2 citations70
US11086240B2Aug 10, 2021
Metrology sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV2 citations68
US10126659B2Nov 13, 2018
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV3 citations68
US12591179B2Mar 31, 2026
Metrology apparatus
ASML NETHERLANDS BV0 citations62
US11927891B2Mar 12, 2024
Apparatus and methods for determining the position of a target structure on a substrate
ASML NETHERLANDS BV0 citations62
US11333985B2May 17, 2022
Position sensor
ASML NETHERLANDS BV0 citations62
US10234767B2Mar 19, 2019
Device and method for processing a radiation beam with coherence
ASML NETHERLANDS BV1 citations62
US11042100B2Jun 22, 2021
Measurement apparatus and method of measuring a target
ASML NETHERLANDS BV0 citations60
US10908514B2Feb 2, 2021
Metrology apparatus, lithographic system, and method of measuring a structure
ASML NETHERLANDS BV0 citations60
US11243470B2Feb 8, 2022
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method
ASML NETHERLANDS BV0 citations49
US10527959B2Jan 7, 2020
Position sensor, lithographic apparatus and method for manufacturing devices
ASML NETHERLANDS BV0 citations41
US9811001B2Nov 7, 2017
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations39