Inventor
SHINAGAWA JUN
US13 patents
⚠️ This page may combine multiple inventors who share the name “SHINAGAWA JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS11869756B2Jan 9, 2024
Virtual metrology enhanced plasma process optimization method
TOKYO ELECTRON LTD3 citations71
US10916411B2Feb 9, 2021
Sensor-to-sensor matching methods for chamber matching
TOKYO ELECTRON LTD3 citations71
US12112107B2Oct 8, 2024
Virtual metrology for wafer result prediction
TOKYO ELECTRON LTD2 citations66
US10622219B2Apr 14, 2020
Methods and systems for chamber matching and monitoring
TOKYO ELECTRON LTD1 citations60
US10438805B2Oct 8, 2019
Methods and systems for chamber matching and monitoring
TOKYO ELECTRON LTD1 citations60
US12032355B2Jul 9, 2024
Virtual metrology model based seasoning optimization
TOKYO ELECTRON LTD0 citations56
US12400888B2Aug 26, 2025
Data fusion of multiple sensors
TOKYO ELECTRON LTD0 citations48
US12300477B2May 13, 2025
Autonomous operation of plasma processing tool
TOKYO ELECTRON LTD0 citations48
US11669079B2Jun 6, 2023
Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements
TOKYO ELECTRON LTD0 citations46