Inventor
KITAO TOSHIHIRO
US4 patents
Patents
4 patentsUS11869756B2Jan 9, 2024
Virtual metrology enhanced plasma process optimization method
TOKYO ELECTRON LTD3 citations71
US12112107B2Oct 8, 2024
Virtual metrology for wafer result prediction
TOKYO ELECTRON LTD2 citations66
US12300477B2May 13, 2025
Autonomous operation of plasma processing tool
TOKYO ELECTRON LTD0 citations48
US11669079B2Jun 6, 2023
Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements
TOKYO ELECTRON LTD0 citations46