Inventor
LEE Chungjong
JP4 patents
Patents
4 patentsUS9735027B2Aug 15, 2017
Method for etching organic film
TOKYO ELECTRON LTD3 citations70
US12400888B2Aug 26, 2025
Data fusion of multiple sensors
TOKYO ELECTRON LTD0 citations48
US12300477B2May 13, 2025
Autonomous operation of plasma processing tool
TOKYO ELECTRON LTD0 citations48
US11669079B2Jun 6, 2023
Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements
TOKYO ELECTRON LTD0 citations46