Inventor · disambiguated record
Masaru Takahama
Also filed as: TAKAHAMA MASARU
5 granted patents·2 pending applications·8 citations·filing 2005–2022
70Inventor score
Top patents by PatentIndex Score
7 records- 0184US11306248B2Silicon etching solution, silicon etching method, and method of producing silicon fin structureTOKYO OHKA KOGYO CO LTD·Filed 2020·Granted Apr 19, 2022·2 cites·5 claims
- 0267US7939590B2Composition for forming silica-based coating filmTOKYO OHKA KOGYO CO LTD·Filed 2006·Granted May 10, 2011·3 cites·5 claims
- 0365US8206509B2Cleaning liquid for lithography and method for forming wiringETO TAKAHIRO·Filed 2010·Granted Jun 26, 2012·3 cites·5 claims
- 0464US11802240B2Silicon etching solution, silicon etching method, and method of producing silicon fin structureTOKYO OHKA KOGYO CO LTD·Filed 2022·Granted Oct 31, 2023·0 cites·5 claims
- 0544US2005267277A1Composition for forming anti-reflective coating film, anti-reflective coating film composed of the composition, and method of forming resist pattern using the compositionTAKAHAMA MASARU·Filed 2005·Application pending·0 cites
- 0640US2008318165A1Composition For Forming Antireflective Film And Wiring Forming Method Using SameTOKYO OHKA KOGYO CO LTD·Filed 2005·Application pending·0 cites
- 0736US8354365B2Cleaning liquid for lithography and method for forming wiringTOKYO OHKA KOGYO CO LTD·Filed 2011·Granted Jan 15, 2013·0 cites·3 claims
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