Inventor
SONG CHUNHUA
US5 patents
⚠️ This page may combine multiple inventors who share the name “SONG CHUNHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFICON INC
4 patentsUS11929270B2Mar 12, 2024
Unconsumed precursor monitoring
INFICON INC2 citations66
US11335575B2May 17, 2022
Unconsumed precursor monitoring
INFICON INC4 citations66
US12266552B2Apr 1, 2025
System and method for monitoring semiconductor processes
INFICON INC0 citations52
US12577675B2Mar 17, 2026
System and method for mass flow measurement and control of process gases in a carrier stream using one or more quartz crystal microbalance sensors
INFICON INC0 citations38