Inventor
TAJIMA RYO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “TAJIMA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
14 patentsUS7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7741601B2Jun 22, 2010
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP36 citations96
US7365324B2Apr 29, 2008
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP49 citations96
US8946631B2Feb 3, 2015
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP11 citations92
US9406480B2Aug 2, 2016
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP3 citations84
US8013315B2Sep 6, 2011
Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same
EBARA CORP2 citations63
US11515118B2Nov 29, 2022
Electron beam irradiation apparatus and electron beam alignment method
EBARA CORP0 citations62
US10002740B2Jun 19, 2018
Inspection device
EBARA CORP0 citations52
US9852878B2Dec 26, 2017
Surface processing apparatus
EBARA CORP0 citations52
US12243710B2Mar 4, 2025
Electron beam irradiation apparatus with overlapping beam columns and helping columns
EBARA CORP0 citations51
US11217421B2Jan 4, 2022
Adjustment method and electron beam device
EBARA CORP0 citations51
US10707048B2Jul 7, 2020
Deflection sensitivity calculation method and deflection sensitivity calculation system
EBARA CORP0 citations41
US10446404B2Oct 15, 2019
Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus
EBARA CORP0 citations41
US9105445B2Aug 11, 2015
Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded
EBARA CORP0 citations41