P

Inventor

TAJIMA RYO

JP17 patents
⚠️ This page may combine multiple inventors who share the name “TAJIMA RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

14 patents
US7138629B2Nov 21, 2006

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP151 citations99
US7741601B2Jun 22, 2010

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP36 citations96
US7365324B2Apr 29, 2008

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP49 citations96
US8946631B2Feb 3, 2015

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP11 citations92
US9406480B2Aug 2, 2016

Testing apparatus using charged particles and device manufacturing method using the testing apparatus

EBARA CORP3 citations84
US8013315B2Sep 6, 2011

Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same

EBARA CORP2 citations63
US11515118B2Nov 29, 2022

Electron beam irradiation apparatus and electron beam alignment method

EBARA CORP0 citations62
US10002740B2Jun 19, 2018

Inspection device

EBARA CORP0 citations52
US9852878B2Dec 26, 2017

Surface processing apparatus

EBARA CORP0 citations52
US12243710B2Mar 4, 2025

Electron beam irradiation apparatus with overlapping beam columns and helping columns

EBARA CORP0 citations51
US11217421B2Jan 4, 2022

Adjustment method and electron beam device

EBARA CORP0 citations51
US10707048B2Jul 7, 2020

Deflection sensitivity calculation method and deflection sensitivity calculation system

EBARA CORP0 citations41
US10446404B2Oct 15, 2019

Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus

EBARA CORP0 citations41
US9105445B2Aug 11, 2015

Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded

EBARA CORP0 citations41

TOKAI IND SEWING MACHINE

1 patent

NOJI NOBUHARU

1 patent

TAJIMA RYO

1 patent