Inventor
Yang hong-jie
TW5 patents
Patents
5 patentsUS11276571B2Mar 15, 2022
Method of breaking through etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12040233B2Jul 16, 2024
Fin field-effect transistor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US12381081B2Aug 5, 2025
Method of breaking through etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11901180B2Feb 13, 2024
Method of breaking through etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12389667B2Aug 12, 2025
Fin field-effect transistor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58