Inventor
CHIU U-TING
TW12 patents
Patents
12 patentsUS11488857B2Nov 1, 2022
Semiconductor device and method of manufacture using a contact etch stop layer (CESL) breakthrough process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11276571B2Mar 15, 2022
Method of breaking through etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12136566B2Nov 5, 2024
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12051619B2Jul 30, 2024
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12469789B2Nov 11, 2025
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12381081B2Aug 5, 2025
Method of breaking through etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12272598B2Apr 8, 2025
Conductive feature of a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12068385B2Aug 20, 2024
Oxidation to mitigate dry etch and/or wet etch fluorine residue
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11996324B2May 28, 2024
Conductive feature of a semiconductor device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11901180B2Feb 13, 2024
Method of breaking through etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11587875B2Feb 21, 2023
Connecting structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11424185B2Aug 23, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51