Inventor
KATSUKI JIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KATSUKI JIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS5728276AMar 17, 1998
Treatment apparatus
TOKYO ELECTRON LTD65 citations95
US7842621B2Nov 30, 2010
Method of measuring nitrogen concentration, method of forming silicon oxynitride film, and method of manufacturing semiconductor device.
TOKYO ELECTRON LTD0 citations39
US10622205B2Apr 14, 2020
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations37