Inventor · disambiguated record
Muneyasu Yokota
Also filed as: YOKOTA MUNEYASU
5 granted patents·249 citations·filing 1992–1997
84Inventor score
Files withNIKON CORP5
Top patents by PatentIndex Score
5 records- 0190US5298761AMethod and apparatus for exposure processNIKON CORP·Filed 1992·Granted Mar 29, 1994·114 cites·18 claims
- 0284US5617211AExposure apparatusNIKON CORP·Filed 1995·Granted Apr 1, 1997·60 cites·19 claims
- 0375US5777722AScanning exposure apparatus and methodNIKON CORP·Filed 1996·Granted Jul 7, 1998·39 cites·34 claims
- 0459US5442418AExposure methodNIKON CORP·Filed 1994·Granted Aug 15, 1995·17 cites·13 claims
- 0551US6104471AExposure apparatus and method wherein the magnification of the projection optical system compensates for physical changes in the substrateNIKON CORP·Filed 1997·Granted Aug 15, 2000·19 cites·31 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →