Inventor
CARPIO RONALD A
US9 patents
⚠️ This page may combine multiple inventors who share the name “CARPIO RONALD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMATECH INC
5 patentsUS5840629ANov 24, 1998
Copper chemical mechanical polishing slurry utilizing a chromate oxidant
SEMATECH INC231 citations98
US5866031AFeb 2, 1999
Slurry formulation for chemical mechanical polishing of metals
SEMATECH INC108 citations97
US5846398ADec 8, 1998
CMP slurry measurement and control technique
SEMATECH INC110 citations97
US5364510ANov 15, 1994
Scheme for bath chemistry measurement and control for improved semiconductor wet processing
SEMATECH INC147 citations97
US5439569AAug 8, 1995
Concentration measurement and control of hydrogen peroxide and acid/base component in a semiconductor bath
SEMATECH INC95 citations95