Inventor
HISANO KAZUYA
JP12 patents
⚠️ This page may combine multiple inventors who share the name “HISANO KAZUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS11823922B2Nov 21, 2023
Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium
TOKYO ELECTRON LTD2 citations72
US11609502B2Mar 21, 2023
Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium
TOKYO ELECTRON LTD1 citations61
US12230540B2Feb 18, 2025
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations60
US12191168B2Jan 7, 2025
Laser processing device, laser processing system and laser processing method
TOKYO ELECTRON LTD0 citations50
US12087588B2Sep 10, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US11669955B2Jun 6, 2023
Substrate defect inspection method, storage medium, and substrate defect inspection apparatus
TOKYO ELECTRON LTD0 citations50
US11268912B2Mar 8, 2022
Substrate inspection method and substrate inspection apparatus
TOKYO ELECTRON LTD0 citations49
US11378388B2Jul 5, 2022
Substrate inspection method, substrate inspection apparatus and recording medium
TOKYO ELECTRON LTD0 citations48
US8040500B2Oct 18, 2011
Defect inspection method and computer-readable storage medium
TOKYO ELECTRON LTD0 citations41