Inventor

TROW JOHN

US14 patents

⚠️ This page may combine multiple inventors who share the name “TROW JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

13 patents

US5824607AOct 20, 1998

Plasma confinement for an inductively coupled plasma reactor

APPLIED MATERIALS INC144 citations99

US6252354B1Jun 26, 2001

RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control

APPLIED MATERIALS INC337 citations98

US6165311ADec 26, 2000

Inductively coupled RF plasma reactor having an overhead solenoidal antenna

APPLIED MATERIALS INC98 citations98

US6077384AJun 20, 2000

Plasma reactor having an inductive antenna coupling power through a parallel plate electrode

APPLIED MATERIALS INC237 citations98

US6074512AJun 13, 2000

Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners

APPLIED MATERIALS INC236 citations98

US6054013AApr 25, 2000

Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density

APPLIED MATERIALS INC596 citations98

US6623596B1Sep 23, 2003

Plasma reactor having an inductive antenna coupling power through a parallel plate electrode

APPLIED MATERIALS INC84 citations97

US6444085B1Sep 3, 2002

Inductively coupled RF plasma reactor having an antenna adjacent a window electrode

APPLIED MATERIALS INC54 citations96

US6524432B1Feb 25, 2003

Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density

APPLIED MATERIALS INC49 citations95

US6454898B1Sep 24, 2002

Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners

APPLIED MATERIALS INC43 citations95

US5574410ANov 12, 1996

Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits

APPLIED MATERIALS INC66 citations95

US5392018AFeb 21, 1995

Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits

APPLIED MATERIALS INC70 citations95

US5572170ANov 5, 1996

Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits

APPLIED MATERIALS INC31 citations92

(unassigned)

1 patent

US6736931B2May 18, 2004

Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor

34 citations92