Inventor
MCKERROW ANDREW J
US10 patents
⚠️ This page may combine multiple inventors who share the name “MCKERROW ANDREW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
5 patentsUS6720247B2Apr 13, 2004
Pre-pattern surface modification for low-k dielectrics using A H2 plasma
TEXAS INSTRUMENTS INC48 citations92
US6838300B2Jan 4, 2005
Chemical treatment of low-k dielectric films
TEXAS INSTRUMENTS INC34 citations91
US6831008B2Dec 14, 2004
Nickel silicide—silicon nitride adhesion through surface passivation
TEXAS INSTRUMENTS INC5 citations60
US6861348B2Mar 1, 2005
Pre-pattern surface modification of low-k dielectrics
TEXAS INSTRUMENTS INC1 citations51
US7087518B2Aug 8, 2006
Method of passivating and/or removing contaminants on a low-k dielectric/copper surface
TEXAS INSTRUMENTS INC0 citations46
NOVELLUS SYSTEMS INC
3 patentsUS8999859B2Apr 7, 2015
Plasma activated conformal dielectric film deposition
NOVELLUS SYSTEMS INC56 citations96
US10043655B2Aug 7, 2018
Plasma activated conformal dielectric film deposition
NOVELLUS SYSTEMS INC28 citations93
US9570274B2Feb 14, 2017
Plasma activated conformal dielectric film deposition
NOVELLUS SYSTEMS INC30 citations93