Inventor

KOMIYA TAKAYUKI

JP10 patents

⚠️ This page may combine multiple inventors who share the name “KOMIYA TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US5904557AMay 18, 1999

Method for forming multilevel interconnection of semiconductor device

TOKYO ELECTRON LTD43 citations92

US5830280ANov 3, 1998

Washing liquid for post-polishing and polishing-cleaning method in semiconductor process

TOKYO ELECTRON LTD33 citations92

US6786974B2Sep 7, 2004

Insulating film forming method and insulating film forming apparatus

TOKYO ELECTRON LTD28 citations90

US6573191B1Jun 3, 2003

Insulating film forming method and insulating film forming apparatus

TOKYO ELECTRON LTD1 citations50

KAWASAKI STEEL CO

3 patents

US6001729ADec 14, 1999

Method of forming wiring structure for semiconductor device

KAWASAKI STEEL CO104 citations97

US5834846ANov 10, 1998

Semiconductor device with contact structure and method of manufacturing the same

KAWASAKI STEEL CO61 citations96

US5652180AJul 29, 1997

Method of manufacturing semiconductor device with contact structure

KAWASAKI STEEL CO35 citations92

HITACHI ELECTR ENG

1 patent

US6515945B2Feb 4, 2003

Recording media library apparatus with a function to detect a position of a recording medium transferred in the library

HITACHI ELECTR ENG3 citations60

EVIDENT CORP

1 patent

US11867496B2Jan 9, 2024

Measurement system, measurement support method, and computer-readable medium

EVIDENT CORP0 citations47

KOMIYA TAKAYUKI

1 patent

US8679978B2Mar 25, 2014

Method for forming a film including Zr, Hf or the like, and method for manufacturing a semiconductor device using the same

KOMIYA TAKAYUKI0 citations44