Inventor
KOJIMA SHIGEYOSHI
JP4 patents
Patents
4 patentsUS6786974B2Sep 7, 2004
Insulating film forming method and insulating film forming apparatus
TOKYO ELECTRON LTD28 citations90
US6936134B2Aug 30, 2005
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD9 citations71
US6573191B1Jun 3, 2003
Insulating film forming method and insulating film forming apparatus
TOKYO ELECTRON LTD1 citations50
US9875915B2Jan 23, 2018
Method for removing metal contamination and apparatus for removing metal contamination
TOKYO ELECTRON LTD0 citations36