Inventor

KOO KYO-WOOG

KR12 patents

⚠️ This page may combine multiple inventors who share the name “KOO KYO-WOOG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMES CO LTD

6 patents

US8038838B2Oct 18, 2011

Spin head, method of operating the spin head and apparatus for treating substrates with the spin head

SEMES CO LTD6 citations61

US7802579B2Sep 28, 2010

Apparatus and method for treating substrates

SEMES CO LTD3 citations61

US7934513B2May 3, 2011

Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility

SEMES CO LTD3 citations58

US7918910B2Apr 5, 2011

Unit for eliminating particles and apparatus for transferring a substrate having the same

SEMES CO LTD5 citations57

US7900853B2Mar 8, 2011

Apparatus for supplying chemical liquid

SEMES CO LTD0 citations48

US7637272B2Dec 29, 2009

Method and apparatus for cleaning and drying substrates

SEMES CO LTD0 citations39

KOO KYO-WOOG

2 patents

US8721834B2May 13, 2014

Apparatus for treating substrate

KOO KYO-WOOG7 citations80

US8122899B2Feb 28, 2012

Apparatus and method for treating substrate

KOO KYO-WOOG0 citations35

CHO JUNG KEUN

2 patents

US8898926B2Dec 2, 2014

Substrate dryer using supercritical fluid, apparatus including the same, and method for treating substrate

CHO JUNG KEUN4 citations68

US8256774B2Sep 4, 2012

Chucking member and spin head and method for chucking substrate using the chucking member

CHO JUNG KEUN1 citations46

YOU JAEHYUN

1 patent

US8738174B2May 27, 2014

Substrate processing apparatus and method for loading and unloading substrates

YOU JAEHYUN7 citations77

PARK KEUN-YOUNG

1 patent

US8267103B2Sep 18, 2012

Method and apparatus for cleaning substrates

PARK KEUN-YOUNG6 citations70