Inventor

FREMGEN JR ROGER P

US4 patents

⚠️ This page may combine multiple inventors who share the name “FREMGEN JR ROGER P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO INSTR INC

3 patents

US7183716B2Feb 27, 2007

Charged particle source and operation thereof

VEECO INSTR INC46 citations88

US6225747B1May 1, 2001

Charged-particle source, control system and process using gating to extract the charged particle beam

VEECO INSTR INC12 citations69

US5982101ANov 9, 1999

Charged-particle source, control system, and process using gating to extract the ion beam

VEECO INSTR INC10 citations69

DRUZ BORIS

1 patent

US9206500B2Dec 8, 2015

Method and apparatus for surface processing of a substrate using an energetic particle beam

DRUZ BORIS4 citations69