Inventor
WILLIAMS KURT E
US4 patents
Patents
4 patentsUS6238582B1May 29, 2001
Reactive ion beam etching method and a thin film head fabricated using the method
VEECO INSTR INC347 citations94
US6464891B1Oct 15, 2002
Method for repetitive ion beam processing with a carbon containing ion beam
VEECO INSTR INC46 citations91
US7183716B2Feb 27, 2007
Charged particle source and operation thereof
VEECO INSTR INC46 citations88
US6838389B2Jan 4, 2005
High selectivity etching of a lead overlay structure
VEECO INSTR INC3 citations52