Inventor

DRUZ BORIS L

US10 patents

⚠️ This page may combine multiple inventors who share the name “DRUZ BORIS L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO INSTR INC

7 patents

US6238582B1May 29, 2001

Reactive ion beam etching method and a thin film head fabricated using the method

VEECO INSTR INC347 citations94

US5969470AOct 19, 1999

Charged particle source

VEECO INSTR INC59 citations93

US6464891B1Oct 15, 2002

Method for repetitive ion beam processing with a carbon containing ion beam

VEECO INSTR INC46 citations91

US6150755ANov 21, 2000

Charged particle source with liquid electrode

VEECO INSTR INC42 citations90

US7183716B2Feb 27, 2007

Charged particle source and operation thereof

VEECO INSTR INC46 citations88

US7557362B2Jul 7, 2009

Ion sources and methods for generating an ion beam with a controllable ion current density distribution

VEECO INSTR INC12 citations83

US11466360B2Oct 11, 2022

Enhanced cathodic ARC source for ARC plasma deposition

VEECO INSTR INC0 citations43

YEVTUKHOV RUSTAM

1 patent

US8835869B2Sep 16, 2014

Ion sources and methods for generating an ion beam with controllable ion current density distribution

YEVTUKHOV RUSTAM18 citations79

HAYES ALAN V

1 patent

US8158016B2Apr 17, 2012

Methods of operating an electromagnet of an ion source

HAYES ALAN V11 citations79

DRUZ BORIS L

1 patent

US9347127B2May 24, 2016

Film deposition assisted by angular selective etch on a surface

DRUZ BORIS L5 citations59