P

Inventor

HEGDE HARI

US4 patents
⚠️ This page may combine multiple inventors who share the name “HEGDE HARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO INSTR INC

3 patents
US7183716B2Feb 27, 2007

Charged particle source and operation thereof

VEECO INSTR INC46 citations88
US6447839B1Sep 10, 2002

Method of depositing multilayer thin films

VEECO INSTR INC9 citations70
US6139906AOct 31, 2000

Methods of depositing multilayer thin films

VEECO INSTR INC7 citations70

HEGDE HARI

1 patent
US8703001B1Apr 22, 2014

Grid assemblies for use in ion beam etching systems and methods of utilizing the grid assemblies

HEGDE HARI10 citations75