Inventor
PATTERSON OLIVER D
US27 patents
⚠️ This page may combine multiple inventors who share the name “PATTERSON OLIVER D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
14 patentsUS8766259B2Jul 1, 2014
Test structure for detection of gap in conductive layer of multilayer gate stack
IBM57 citations98
US8350583B2Jan 8, 2013
Probe-able voltage contrast test structures
IBM84 citations98
US7518190B2Apr 14, 2009
Grounding front-end-of-line structures on a SOI substrate
IBM94 citations98
US7456636B2Nov 25, 2008
Test structures and method of defect detection using voltage contrast inspection
IBM95 citations98
US9519210B2Dec 13, 2016
Voltage contrast characterization structures and methods for within chip process variation characterization
IBM57 citations97
US8927989B2Jan 6, 2015
Voltage contrast inspection of deep trench isolation
IBM86 citations97
US8039837B2Oct 18, 2011
In-line voltage contrast detection of PFET silicide encroachment
IBM83 citations97
US7772866B2Aug 10, 2010
Structure and method of mapping signal intensity to surface voltage for integrated circuit inspection
IBM85 citations97
US7733109B2Jun 8, 2010
Test structure for resistive open detection using voltage contrast inspection and related methods
IBM92 citations97
US7474107B2Jan 6, 2009
Buried short location determination using voltage contrast inspection
IBM105 citations97
US7927895B1Apr 19, 2011
Varying capacitance voltage contrast structures to determine defect resistance
IBM9 citations84
US7732866B2Jun 8, 2010
Grounding front-end-of-line structures on a SOI substrate
IBM9 citations84
US7397556B2Jul 8, 2008
Method, apparatus, and computer program product for optimizing inspection recipes using programmed defects
IBM2 citations61
US9207279B2Dec 8, 2015
Inspection tool and methodology for three dimensional voltage contrast inspection
IBM1 citations52
PATTERSON OLIVER D
4 patentsUS8750597B2Jun 10, 2014
Robust inspection alignment of semiconductor inspection tools using design information
PATTERSON OLIVER D65 citations94
US8841933B2Sep 23, 2014
Inspection tool and methodology for three dimensional voltage contrast inspection
PATTERSON OLIVER D2 citations62
US8787074B2Jul 22, 2014
Static random access memory test structure
PATTERSON OLIVER D2 citations56
US9291665B2Mar 22, 2016
Evaluating transistors with e-beam inspection
PATTERSON OLIVER D1 citations51
COTE WILLIAM J
3 patentsGLOBALFOUNDRIES INC
3 patentsUS10649026B2May 12, 2020
Apparatus for and method of net trace prior level subtraction
GLOBALFOUNDRIES INC2 citations70
US9293382B2Mar 22, 2016
Voltage contrast inspection of deep trench isolation
GLOBALFOUNDRIES INC0 citations51
US9390884B2Jul 12, 2016
Method of inspecting a semiconductor substrate
GLOBALFOUNDRIES INC0 citations50