Inventor
SCHULZ ARNE VEIT
DE4 patents
Patents
4 patentsUS7259080B2Aug 21, 2007
Glass-type planar substrate, use thereof, and method for the production thereof
FRAUNHOFER GES FORSCHUNG33 citations91
US6951119B1Oct 4, 2005
Method for producing micromechanical and micro-optic components consisting of glass-type materials
FRAUNHOFER GES FORSCHUNG28 citations91
US7416961B2Aug 26, 2008
Method for structuring a flat substrate consisting of a glass-type material
FRAUNHOFER GES FORSCHUNG7 citations72
US7364930B2Apr 29, 2008
Method for producing micromechanical and micro-optic components consisting of glass-type materials
FRAUNHOFER GES FORSCHUNG4 citations61