Inventor

PETERSON INGRID B

US7 patents

⚠️ This page may combine multiple inventors who share the name “PETERSON INGRID B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

3 patents

US7769225B2Aug 3, 2010

Methods and systems for detecting defects in a reticle design pattern

KLA TENCOR TECH CORP80 citations96

US7418124B2Aug 26, 2008

Qualifying patterns, patterning processes, or patterning apparatus in the fabrication of microlithographic patterns

KLA TENCOR TECH CORP76 citations91

US7729529B2Jun 1, 2010

Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle

KLA TENCOR TECH CORP39 citations90

KLA TENCOR TECHNOLOGIES

1 patent

US6902855B2Jun 7, 2005

Qualifying patterns, patterning processes, or patterning apparatus in the fabrication of microlithographic patterns

KLA TENCOR TECHNOLOGIES108 citations93

WU KENONG

1 patent

US8111900B2Feb 7, 2012

Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle

WU KENONG27 citations89

PETERSON INGRID B

1 patent

US8213704B2Jul 3, 2012

Methods and systems for detecting defects in a reticle design pattern

PETERSON INGRID B54 citations85

RICE MICHAEL R

1 patent

US8078304B2Dec 13, 2011

Dual-mode robot systems and methods for electronic device manufacturing

RICE MICHAEL R10 citations79