Inventor
MITOME NORIYUKI
JP6 patents
Patents
6 patentsUS4901109AFeb 13, 1990
Alignment and exposure apparatus
CANON KK58 citations95
US5695897ADec 9, 1997
Alignment method and semiconductor exposure method
CANON KK48 citations92
US5172189ADec 15, 1992
Exposure apparatus
CANON KK34 citations90
US5790258AAug 4, 1998
Position detecting device
CANON KK12 citations72
US7733471B2Jun 8, 2010
Foreign substance inspection apparatus
CANON KK2 citations60
US7986403B2Jul 26, 2011
Foreign substance inspection apparatus
CANON KK0 citations49