Inventor

KOIZUMI KENJIRO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “KOIZUMI KENJIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US10041174B2Aug 7, 2018

Method for forming carbon nanotubes and carbon nanotube film forming apparatus

TOKYO ELECTRON LTD39 citations93

US9059178B2Jun 16, 2015

Method for forming carbon nanotubes and carbon nanotube film forming apparatus

TOKYO ELECTRON LTD36 citations93

US7887670B2Feb 15, 2011

Gas introducing mechanism and processing apparatus for processing object to be processed

TOKYO ELECTRON LTD8 citations81

US9850132B2Dec 26, 2017

Method for growing carbon nanotubes

TOKYO ELECTRON LTD0 citations40

MATSUMOTO TAKASHI

1 patent

US8728917B2May 20, 2014

Carbon nanotube forming method and pre-treatment method therefor

MATSUMOTO TAKASHI5 citations70

NOMURA MASAMICHI

1 patent

US8299671B2Oct 30, 2012

Processing apparatus

NOMURA MASAMICHI2 citations54