Inventor

YOSHII NAOKI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “YOSHII NAOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US7717061B2May 18, 2010

Gas switching mechanism for plasma processing apparatus

TOKYO ELECTRON LTD20 citations84

US7887670B2Feb 15, 2011

Gas introducing mechanism and processing apparatus for processing object to be processed

TOKYO ELECTRON LTD8 citations81

US11225708B2Jan 18, 2022

Plasma spraying device and method for manufacturing battery electrode

TOKYO ELECTRON LTD3 citations67

US7699945B2Apr 20, 2010

Substrate treatment method and film forming method, film forming apparatus, and computer program

TOKYO ELECTRON LTD2 citations59

US7846839B2Dec 7, 2010

Film forming method, semiconductor device manufacturing method, semiconductor device, program and recording medium

TOKYO ELECTRON LTD1 citations51

KOUKITU AKINORI

1 patent

US8822263B2Sep 2, 2014

Epitaxial growth method of a zinc oxide based semiconductor layer, epitaxial crystal structure, epitaxial crystal growth apparatus, and semiconductor device

KOUKITU AKINORI9 citations82

KOJIMA YASUHIKO

1 patent

US8211500B2Jul 3, 2012

Copper film deposition method

KOJIMA YASUHIKO3 citations61

YOSHII NAOKI

1 patent

US8721846B2May 13, 2014

Method of forming film, film forming apparatus and storage medium

YOSHII NAOKI0 citations33