Inventor
KOMORI KATSUHIKO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KOMORI KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS7648895B2Jan 19, 2010
Vertical CVD apparatus for forming silicon-germanium film
TOKYO ELECTRON LTD337 citations98
US10570508B2Feb 25, 2020
Film forming apparatus, film forming method and heat insulating member
TOKYO ELECTRON LTD2 citations73
US9758865B2Sep 12, 2017
Silicon film forming method, thin film forming method and cross-sectional shape control method
TOKYO ELECTRON LTD4 citations73
US7273818B2Sep 25, 2007
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD7 citations73
US9558940B2Jan 31, 2017
Method and apparatus for forming silicon film
TOKYO ELECTRON LTD2 citations72
US9984875B2May 29, 2018
Film forming method
TOKYO ELECTRON LTD0 citations52
US9384974B2Jul 5, 2016
Trench filling method and processing apparatus
TOKYO ELECTRON LTD0 citations52
US9798317B2Oct 24, 2017
Substrate processing method and control apparatus
TOKYO ELECTRON LTD1 citations51
US9490139B2Nov 8, 2016
Method and apparatus for forming silicon film
TOKYO ELECTRON LTD0 citations51
US9799577B2Oct 24, 2017
Heat treatment system, heat treatment method, and program
TOKYO ELECTRON LTD0 citations41
US9318328B2Apr 19, 2016
Method and apparatus for forming silicon film
TOKYO ELECTRON LTD0 citations41