Inventor

CHANG HONG-YOUNG

KR7 patents

⚠️ This page may combine multiple inventors who share the name “CHANG HONG-YOUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOREA ADVANCED INST SCI & TECH

3 patents

US9066413B2Jun 23, 2015

Plasma generation apparatus

KOREA ADVANCED INST SCI & TECH9 citations78

US9734990B2Aug 15, 2017

Plasma apparatus and substrate-processing apparatus

KOREA ADVANCED INST SCI & TECH5 citations72

US5627640AMay 6, 1997

Method for measuring radical species distribution in plasma and an apparatus therefor

KOREA ADVANCED INST SCI & TECH14 citations71

JUSUNG ENG CO LTD

2 patents

US6288493B1Sep 11, 2001

Antenna device for generating inductively coupled plasma

JUSUNG ENG CO LTD84 citations94

US7442273B2Oct 28, 2008

Apparatus using hybrid coupled plasma

JUSUNG ENG CO LTD18 citations82

CHANG HONG YOUNG

1 patent

US10553406B2Feb 4, 2020

Plasma generating apparatus and substrate processing apparatus

CHANG HONG YOUNG8 citations77

HALASYAMANI P SHIV

1 patent

US8999189B2Apr 7, 2015

Ferroelectric fluoride compositions and methods of making and using same

HALASYAMANI P SHIV0 citations41