Inventor

MARSH EUGENE

US7 patents

⚠️ This page may combine multiple inventors who share the name “MARSH EUGENE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRON TECHNOLOGY INC

4 patents

US6673701B1Jan 6, 2004

Atomic layer deposition methods

MICRON TECHNOLOGY INC223 citations97

US7271077B2Sep 18, 2007

Deposition methods with time spaced and time abutting precursor pulses

MICRON TECHNOLOGY INC82 citations96

US7521356B2Apr 21, 2009

Atomic layer deposition systems and methods including silicon-containing tantalum precursor compounds

MICRON TECHNOLOGY INC13 citations83

US8034315B2Oct 11, 2011

Methods of forming devices comprising carbon nanotubes

MICRON TECHNOLOGY INC5 citations62

SONY CORP

2 patents

US9406879B2Aug 2, 2016

Conductive bridge memory system and method of manufacture thereof

SONY CORP0 citations43

US9246086B2Jan 26, 2016

Conductive bridge memory system and method of manufacture thereof

SONY CORP0 citations43

ROUND ROCK RES LLC

1 patent

US7943507B2May 17, 2011

Atomic layer deposition systems and methods including silicon-containing tantalum precursor compounds

ROUND ROCK RES LLC2 citations61