Inventor

TOMITA YUGO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “TOMITA YUGO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US9984906B2May 29, 2018

Plasma processing device and plasma processing method

TOKYO ELECTRON LTD2 citations69

US9543191B2Jan 10, 2017

Wiring structure having interlayer insulating film and wiring line without a barrier layer between

TOKYO ELECTRON LTD0 citations46

US9324542B2Apr 26, 2016

Plasma processing method and plasma processing apparatus

TOKYO ELECTRON LTD0 citations37

SUBARU CORP

2 patents

US12188872B2Jan 7, 2025

Adhesion interface observation method

SUBARU CORP0 citations48

US11407056B2Aug 9, 2022

Pierce metal for joining different materials and method of joining different materials using pierce metal

SUBARU CORP0 citations41