Inventor
SATO YOSHIYASU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SATO YOSHIYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS10229844B2Mar 12, 2019
Gas supply system, gas supply control method and gas replacement method
TOKYO ELECTRON LTD3 citations71
US10472717B2Nov 12, 2019
Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus
TOKYO ELECTRON LTD6 citations68
US9324542B2Apr 26, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations37