Inventor
MIKAMI SHUNICHI
TW5 patents
Patents
5 patentsUS10069443B2Sep 4, 2018
Dechuck control method and plasma processing apparatus
TOKYO ELECTRON LTD4 citations68
US9653321B2May 16, 2017
Plasma processing method
TOKYO ELECTRON LTD1 citations45
US10290510B2May 14, 2019
Plasma etching method, pattern forming method and cleaning method
TOKYO ELECTRON LTD0 citations35
US10283368B2May 7, 2019
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD0 citations35
US9147556B2Sep 29, 2015
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations35