Inventor

MITROVIC BOJAN

US19 patents

⚠️ This page may combine multiple inventors who share the name “MITROVIC BOJAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITROVIC BOJAN

VEECO INSTR INC

Multi-filament heater assembly

Chemical vapor deposition flow inlet elements and methods

Chemical vapor deposition with elevated temperature gas injection

Periphery purge shutter and flow control systems and methods

Processing methods and apparatus with temperature distribution control

Density-matching alkyl push flow for vertical flow rotating disk reactors

Methods of wafer processing with carrier extension

Chemical vapor deposition apparatus with multi-zone injection block

MITROVIC BOJAN

Gas treatment systems

Gas treatment systems

Gas treatment systems

Density-matching alkyl push flow for vertical flow rotating disk reactors

Wafer carrier with sloped edge

Wafer processing with carrier extension

GURARY ALEX

Chemical vapor deposition with elevated temperature gas injection

Chemical vapor deposition with elevated temperature gas injection

Processing methods and apparatus with temperature distribution control

BELOUSOV MIKHAIL

Chemical vapor deposition flow inlet elements and methods

Chemical vapor deposition flow inlet elements and methods