Inventor
LEE CHIH-JIE
TW10 patents
Patents
10 patentsUS10678142B2Jun 9, 2020
Optical proximity correction and photomasks
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations85
US11789370B2Oct 17, 2023
Optical proximity correction and photomasks
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11243472B2Feb 8, 2022
Optical proximity correction and photomasks
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12265334B2Apr 1, 2025
Optical proximity correction and photomasks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12085867B2Sep 10, 2024
Lithography process monitoring method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11782352B2Oct 10, 2023
Lithography process monitoring method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11467509B2Oct 11, 2022
Lithography process monitoring method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10962892B2Mar 30, 2021
Lithography process monitoring method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10488766B2Nov 26, 2019
Lithography system having invisible pellicle over mask
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10418245B2Sep 17, 2019
Method for integrated circuit manufacturing with directed self-assembly (DSA)
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51