Inventor

TSAI MING-HSUN

TW37 patents

⚠️ This page may combine multiple inventors who share the name “TSAI MING-HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSAI MING-HSUN

TAIWAN SEMICONDUCTOR MFG CO LTD

Method and apparatus for removing debris from collector

Droplet generator and method of servicing a photolithographic tool

Particle removal device and method

Droplet generator and method of servicing a photolithographic tool

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Target feeding system

Radiation source apparatus and method for using the same

System and method for supplying target material in an EUV light source

EUV photolithography system fuel source and methods of operating the same

Protective ring structure for vacuum interface and method of using the same

Methods of servicing photolithographic apparatus

Particle removal device and method

Apparatus and method for generating extreme ultraviolet radiation

Method for using radiation source apparatus

Droplet collecting system and method of using the same

Droplet generator and method of servicing extreme ultraviolet radiation source apparatus

Apparatus and method for generating extreme ultraviolet radiation

Semiconductor processing tool and methods of operation

Semiconductor processing tool and methods of operation

Extreme ultraviolet photolithography method

Droplet generator assembly and method for using the same and radiation source apparatus

Extreme ultraviolet photolithography system and method

EUV photolithography system fuel source and methods of operating the same

Method and system for generating droplets for EUV photolithography processes

Inspection tool for an extreme ultraviolet radiation source to observe tin residual

Method and system for generating droplets for EUV photolithography processes

EUV photolithography system and methods of operating the same

Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber

Lithography system and methods

Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber

Droplet generator assembly and method of replacing components

DEXIN CORP

Mouse pad device

Mouse pad device

TSAI MING-HSUN

Resizable wireless pointing device with a storable receiver

POWERCHIP SEMICONDUCTOR MFG CORP

Wafer structure including probe marked test pads

NAT SYNCHROTRON RADIATION RES CT

Relief valve assembly with anti-frozen shielding hat