Inventor
SHEN HUA
CN21 patents
⚠️ This page may combine multiple inventors who share the name “SHEN HUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SIEMENS AG
6 patentsUS6165864ADec 26, 2000
Tapered electrode for stacked capacitors
SIEMENS AG62 citations94
US6001684ADec 14, 1999
Method for forming a capacitor
SIEMENS AG30 citations92
US6136660AOct 24, 2000
Stacked capacitator memory cell and method of fabrication
SIEMENS AG8 citations74
US6313495B1Nov 6, 2001
Stack capacitor with improved plug conductivity
SIEMENS AG9 citations73
US6046059AApr 4, 2000
Method of forming stack capacitor with improved plug conductivity
SIEMENS AG13 citations73
US5966624AOct 12, 1999
Method of manufacturing a semiconductor structure having a crystalline layer
SIEMENS AG8 citations73
INFINEON TECHNOLOGIES AG
4 patentsUS6537870B1Mar 25, 2003
Method of forming an integrated circuit comprising a self aligned trench
INFINEON TECHNOLOGIES AG110 citations97
US6420272B1Jul 16, 2002
Method for removal of hard mask used to define noble metal electrode
INFINEON TECHNOLOGIES AG29 citations90
US6707086B1Mar 16, 2004
Method for forming crystalline silicon nitride
INFINEON TECHNOLOGIES AG7 citations70
US6420267B1Jul 16, 2002
Method for forming an integrated barrier/plug for a stacked capacitor
INFINEON TECHNOLOGIES AG5 citations62
IBM
4 patentsUS6207584B1Mar 27, 2001
High dielectric constant material deposition to achieve high capacitance
IBM24 citations90
US6379577B2Apr 30, 2002
Hydrogen peroxide and acid etchant for a wet etch process
IBM18 citations81
US6339007B1Jan 15, 2002
Capacitor stack structure and method of fabricating description
IBM15 citations81
US6057216AMay 2, 2000
Low temperature diffusion process for dopant concentration enhancement
IBM16 citations81