Inventor
RUI XIANGXIN
US47 patents
⚠️ This page may combine multiple inventors who share the name “RUI XIANGXIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTERMOLECULAR INC
17 patentsUS9105646B2Aug 11, 2015
Methods for reproducible flash layer deposition
INTERMOLECULAR INC12 citations84
US9012298B2Apr 21, 2015
Methods for reproducible flash layer deposition
INTERMOLECULAR INC7 citations84
US8546236B2Oct 1, 2013
High performance dielectric stack for DRAM capacitor
INTERMOLECULAR INC5 citations84
US7927947B2Apr 19, 2011
Methods for depositing high-K dielectrics
INTERMOLECULAR INC10 citations84
US8815695B2Aug 26, 2014
Methods to improve leakage for ZrO2 based high K MIM capacitor
INTERMOLECULAR INC4 citations73
US8766346B1Jul 1, 2014
Methods to improve leakage of high K materials
INTERMOLECULAR INC4 citations73
US9082782B2Jul 14, 2015
Inexpensive electrode materials to facilitate rutile phase titanium oxide
INTERMOLECULAR INC1 citations63
US8581319B2Nov 12, 2013
Semiconductor stacks including catalytic layers
INTERMOLECULAR INC4 citations63
US8476141B2Jul 2, 2013
High performance dielectric stack for DRAM capacitor
INTERMOLECULAR INC3 citations63
US8541828B2Sep 24, 2013
Methods for depositing high-K dielectrics
INTERMOLECULAR INC2 citations62
US8541283B2Sep 24, 2013
High performance dielectric stack for DRAM capacitor
INTERMOLECULAR INC3 citations62
US9178006B2Nov 3, 2015
Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applications
INTERMOLECULAR INC3 citations61
US9099430B2Aug 4, 2015
ZrO-based high K dielectric stack for logic decoupling capacitor or embedded DRAM
INTERMOLECULAR INC0 citations52
US8980744B2Mar 17, 2015
Inexpensive electrode materials to facilitate rutile phase titanium oxide
INTERMOLECULAR INC0 citations52
US8975147B2Mar 10, 2015
Enhanced work function layer supporting growth of rutile phase titanium oxide
INTERMOLECULAR INC0 citations52
US8846468B2Sep 30, 2014
Methods to improve leakage of high K materials
INTERMOLECULAR INC1 citations52
US8569819B1Oct 29, 2013
Doped electrodes for DRAM applications
INTERMOLECULAR INC1 citations52
APPLIED MATERIALS INC
16 patentsUS11742362B2Aug 29, 2023
Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC2 citations72
US11145683B2Oct 12, 2021
Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC1 citations72
US10697062B2Jun 30, 2020
Gas flow guide design for uniform flow distribution and efficient purge
APPLIED MATERIALS INC3 citations71
US11664216B2May 30, 2023
ALD process and hardware with improved purge efficiency
APPLIED MATERIALS INC0 citations63
US10964533B2Mar 30, 2021
ALD process and hardware with improved purge efficiency
APPLIED MATERIALS INC0 citations63
US12148766B2Nov 19, 2024
High-K dielectric materials comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US12080725B2Sep 3, 2024
Hybrid high-K dielectric material film stacks comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US11894396B2Feb 6, 2024
High-K dielectric materials comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US11600642B2Mar 7, 2023
Layer stack for display applications
APPLIED MATERIALS INC0 citations62
US11239258B2Feb 1, 2022
High-k dielectric materials comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US11049887B2Jun 29, 2021
Layer stack for display applications
APPLIED MATERIALS INC0 citations62
US12076763B2Sep 3, 2024
Selective in-situ cleaning of high-k films from processing chamber using reactive gas precursor
APPLIED MATERIALS INC0 citations52
US10615368B2Apr 7, 2020
Encapsulating film stacks for OLED applications with desired profile control
APPLIED MATERIALS INC0 citations52
US10158098B2Dec 18, 2018
Encapsulating film stacks for OLED applications
APPLIED MATERIALS INC1 citations52
US9847511B2Dec 19, 2017
Encapsulating film stacks for OLED applications
APPLIED MATERIALS INC1 citations52
US10655222B2May 19, 2020
Thin film encapsulation processing system and process kit
APPLIED MATERIALS INC0 citations46
CHEN HANHONG
4 patentsUS8815677B2Aug 26, 2014
Method of processing MIM capacitors to reduce leakage current
CHEN HANHONG5 citations73
US8809160B2Aug 19, 2014
Methods for forming high-K crystalline films and related devices
CHEN HANHONG4 citations73
US8574997B2Nov 5, 2013
Method of using a catalytic layer to enhance formation of a capacitor stack
CHEN HANHONG0 citations52
US8530322B2Sep 10, 2013
Method of forming stacked metal oxide layers
CHEN HANHONG0 citations52