Inventor
ZHAO LAI
US26 patents
Patents
26 patentsUS9818606B2Nov 14, 2017
Amorphous silicon thickness uniformity improved by process diluted with hydrogen and argon gas mixture
APPLIED MATERIALS INC4 citations73
US9299558B2Mar 29, 2016
Run-to-run stability of film deposition
APPLIED MATERIALS INC3 citations73
US11742362B2Aug 29, 2023
Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC2 citations72
US11145683B2Oct 12, 2021
Hybrid high-k dielectric material film stacks comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC1 citations72
US10883174B2Jan 5, 2021
Gas diffuser mounting plate for reduced particle generation
APPLIED MATERIALS INC2 citations69
US12148766B2Nov 19, 2024
High-K dielectric materials comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US12080725B2Sep 3, 2024
Hybrid high-K dielectric material film stacks comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US12021152B2Jun 25, 2024
Process to reduce plasma induced damage
APPLIED MATERIALS INC0 citations62
US11895872B2Feb 6, 2024
Thin film transistor with small storage capacitor with metal oxide switch
APPLIED MATERIALS INC0 citations62
US11894396B2Feb 6, 2024
High-K dielectric materials comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US11670722B2Jun 6, 2023
Process to reduce plasma induced damage
APPLIED MATERIALS INC0 citations62
US11600642B2Mar 7, 2023
Layer stack for display applications
APPLIED MATERIALS INC0 citations62
US11380801B2Jul 5, 2022
Process to reduce plasma induced damage
APPLIED MATERIALS INC0 citations62
US11239258B2Feb 1, 2022
High-k dielectric materials comprising zirconium oxide utilized in display devices
APPLIED MATERIALS INC0 citations62
US11101338B2Aug 24, 2021
Thin film transistor with small storage capacitor with metal oxide switch
APPLIED MATERIALS INC0 citations62
US11049887B2Jun 29, 2021
Layer stack for display applications
APPLIED MATERIALS INC0 citations62
US11123837B2Sep 21, 2021
Method of removal of sharp corners from diffuser plate
APPLIED MATERIALS INC0 citations61
US10927461B2Feb 23, 2021
Gas diffuser support structure for reduced particle generation
APPLIED MATERIALS INC0 citations61
US12076763B2Sep 3, 2024
Selective in-situ cleaning of high-k films from processing chamber using reactive gas precursor
APPLIED MATERIALS INC0 citations52
US11773489B2Oct 3, 2023
Gas confiner assembly for eliminating shadow frame
APPLIED MATERIALS INC0 citations52
US10748759B2Aug 18, 2020
Methods for improved silicon nitride passivation films
APPLIED MATERIALS INC0 citations52
US10697063B2Jun 30, 2020
Corner spoiler for improving profile uniformity
APPLIED MATERIALS INC0 citations52
US9048099B2Jun 2, 2015
Multi-layer amorphous silicon structure with improved poly-silicon quality after excimer laser anneal
APPLIED MATERIALS INC0 citations52
US10923327B2Feb 16, 2021
Chamber liner
APPLIED MATERIALS INC0 citations51
US10804408B2Oct 13, 2020
Process to reduce plasma induced damage
APPLIED MATERIALS INC0 citations51
US12136538B2Nov 5, 2024
Deposition chamber system diffuser with increased power efficiency
APPLIED MATERIALS INC0 citations46