Inventor

JIANG XINRONG

US37 patents

⚠️ This page may combine multiple inventors who share the name “JIANG XINRONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JIANG XINRONG

KLA TENCOR CORP

Multiple-beam system for high-speed electron-beam inspection

Immersion gun equipped electron beam column

Electron beam apparatus with high resolutions

Electron beam imaging with dual Wien-filter monochromator

Deflection array apparatus for multi-electron beam system

Method and system for aberration correction in an electron beam system

High resolution electron energy analyzer

Method and system for edge-of-wafer inspection and review

Extractor electrode for electron source

Tilt-imaging scanning electron microscope

System and method for imaging a sample with an electron beam with a filtered energy spread

Heat-spreading blanking system for high throughput electron beam apparatus

Method and system for edge-of-wafer inspection and review

Method and system for aberration correction in an electron beam system

KLA CORP

Electron beam system for inspection and review of 3D devices

Micro stigmator array for multi electron beam system

High throughput multi-electron beam system

High resolution electron beam apparatus with dual-aperture schemes

Electron source with magnetic suppressor electrode

Creating multiple electron beams with a photocathode film

Method and system of image-forming multi-electron beams

Systems and methods of creating multiple electron beams

High resolution, multi-electron beam apparatus

Joint electron-optical columns for flood-charging and image-forming in voltage contrast wafer inspections

System and method for multi-beam electron microscopy using a detector array

Tilt-column multi-beam electron microscopy system and method

JIANG XINRONG

Electron-optical system for high-speed and high-sensitivity inspections

Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents

Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments

Apparatus and methods for high-resolution electron beam imaging

APPLIED MATERIALS INC

Method and apparatus for multiple charged particle beams

Method and apparatus for multiple charged particle beams

Method and apparatus for multiple charged particle beams

HAN LIQUN

High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture

JEOL LTD

Electron beam column for writing shaped electron beams

BULLER BENYAMIN

Multi-function module for an electron beam column

MANKOS MARIAN

Electron beam column and methods of using same