Inventor

GRELLA LUCA

US19 patents

⚠️ This page may combine multiple inventors who share the name “GRELLA LUCA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GRELLA LUCA

KLA TENCOR TECH CORP

Method and system for e-beam scanning

Filtered e-beam inspection and review

Calibration standards and methods

Filtered e-beam inspection and review

Dynamic pattern generator with cup-shaped structure

Method and system for e-beam scanning

Undercut measurement using SEM

E-beam detection of defective contacts/vias with flooding and energy filter

Apparatus and method for tilted particle-beam illumination

Method and apparatus for accurate e-beam metrology

KLA TENCOR CORP

Extractor electrode for electron source

Charge control device for a system with multiple electron beams

Space charge insensitive electron gun designs

Electron beam patterning

Method and system for charge control for imaging floating metal structures on non-conducting substrates

KLA CORP

High resolution electron beam apparatus with dual-aperture schemes

Systems and methods of creating multiple electron beams

Cold-field-emitter electron gun with self-cleaning extractor using reversed e-beam current

GRELLA LUCA

Electron reflector with multiple reflective modes