Inventor
CUMMINGS KEVIN
US9 patents
⚠️ This page may combine multiple inventors who share the name “CUMMINGS KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS6943941B2Sep 13, 2005
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV58 citations94
US7511884B2Mar 31, 2009
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV23 citations91
US7221501B2May 22, 2007
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV28 citations91
US7206059B2Apr 17, 2007
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV9 citations73
US7022437B2Apr 4, 2006
Perfluoropolyether liquid pellicle and methods of cleaning masks using perfluoropolyether liquid
ASML NETHERLANDS BV10 citations72
US7022436B2Apr 4, 2006
Embedded etch stop for phase shift masks and planar phase shift masks to reduce topography induced and wave guide effects
ASML NETHERLANDS BV6 citations61