Inventor
ROSE JOSEPH D
US13 patents
⚠️ This page may combine multiple inventors who share the name “ROSE JOSEPH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERSUM MAT US LLC
12 patentsUS11078417B2Aug 3, 2021
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC2 citations72
US12091581B2Sep 17, 2024
High oxide film removal rate shallow trench (STI) chemical mechanical planarization (CMP) polishing
VERSUM MAT US LLC0 citations62
US11692110B2Jul 4, 2023
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC0 citations62
US11667839B2Jun 6, 2023
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC0 citations62
US11608451B2Mar 21, 2023
Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with tunable silicon oxide and silicon nitride removal rates
VERSUM MAT US LLC0 citations62
US11549034B2Jan 10, 2023
Oxide chemical mechanical planarization (CMP) polishing compositions
VERSUM MAT US LLC0 citations62
US11326076B2May 10, 2022
Shallow trench isolation (STI) chemical mechanical planarization (CMP) polishing with low abrasive concentration and a combination of chemical additives
VERSUM MAT US LLC0 citations62
US11072726B2Jul 27, 2021
Low oxide trench dishing chemical mechanical polishing
VERSUM MAT US LLC0 citations62
US11718767B2Aug 8, 2023
Chemical mechanical planarization composition for polishing oxide materials and method of use thereof
VERSUM MAT US LLC1 citations56
US12234383B2Feb 25, 2025
Low dishing oxide CMP polishing compositions for shallow trench isolation applications and methods of making thereof
VERSUM MAT US LLC0 citations51
US11254839B2Feb 22, 2022
Low oxide trench dishing shallow trench isolation chemical mechanical planarization polishing
VERSUM MAT US LLC0 citations51
US11180678B2Nov 23, 2021
Suppressing SiN removal rates and reducing oxide trench dishing for Shallow Trench Isolation (STI) process
VERSUM MAT US LLC0 citations51