Inventor
HONG TSUNG-HSUAN
TW5 patents
Patents
5 patentsUS9437484B2Sep 6, 2016
Etch stop layer in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD28 citations93
US10090242B2Oct 2, 2018
Etch stop layer in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US11942419B2Mar 26, 2024
Etch stop layer in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11404368B2Aug 2, 2022
Etch stop layer in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10720386B2Jul 21, 2020
Etch stop layer in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51